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and hydrogen service
6 The measurements described in this Guide are known to be applicable to BWSs with thickness in the range of 750 µm to 1550 µm
2 The Guide covers generic equipment characteristics of (Table 1)
thickness variation
This Document defines a method of testing the interior surfaces of stainless steel tubing
F02900 - SEMI F29 - Test Method for Purge Efficacy of Gas Source System Panels Revision:SEMI F29-0997 (Reapproved 0611) - Superseded and hydrogen serviceNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard defines the purge efficacy test method recommended for determining the minimum acceptable level of purge efficacy for gas source systems used in semiconductor manufacturing. It is also intended as an aid to
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